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Chip inspection device
- High-speed and reliable inspection is possible with a unique image processing unit. - By adding measurement stations, most LD chip inspections are possible. - Automatic reading function for LD numbers. - Pad marking for defective chips and marking check function. - Alignment function for the discharge section. - Equipment size: 1000W × 1000D × 1800H.
High-precision cleanroom-compatible auto-review microscope
This is an autofocus microscope that inspects fine chip defects on MEMS wafers. The autofocus microscope is mounted on the XYZ electric body. By placing the wafer and controlling the XYZ stage with software, it can inspect the device chip on the wafer and input focused images of defect locations at the optimal magnification for inspection. For more details, please download and view the catalog.
